SYSTEM FOR MONITORING TEMPERATURE AND HUMIDITY STATE INSIDE WAFER CARRIER USING TEMPERATURE AND HUMIDITY SENSOR BASED ON SHORT-DISTANCE WIRELESS COMMUNICATION AND METHOD THEREOF

摘要

The present invention relates to a system for monitoring the temperature and a humidity state inside a wafer carrier. More particularly, the system comprises: an environmental state measurement unit mounted in each wafer carrier and measuring a temperature and humidity state therein; an environmental state data collection unit provided at each predetermined point on a moving line of the wafer carrier to collect temperature and humidity data measured through a short-range wireless communication connection from the environmental state measurement unit of the adjacent wafer carrier; and an environmental condition monitoring unit which receives the temperature and humidity data from each environmental state data collection unit and monitors the temperature and humidity state inside each wafer carrier based on the temperature and humidity data.;COPYRIGHT KIPO 2020