Systems for uniform temperature control of electrically decoupled electrodes by means of heat pipes and treatment facilities including systems of this kind

摘要

The present invention relates to a system for temperature control of an electrode. The system includes at least one heat pipe, a coupling element and a temperature control device. In this case, the heat pipe is suitable for at least partially and at least one first end to be arranged on the electrode. The coupling element is suitable for heating or cooling the second end of the heat pipe, while the temperature control device is suitable for heating or cooling the coupling element. In this case, the electrode and the temperature control device are separated from each other in a galvanic manner. The invention also relates to a processing plant comprising a processing chamber and at least one electrode inside the processing chamber, and at least one system of this kind for temperature control of the electrodes.