RF OLED RF RF METHOD FOR FORMING OLED ORGANIC THIN FILM LAYERS FOR USING RF SPUTTERING APPARATUS RF SPUTTERING APPARATUS AND APPARATUS FOR FORMING TARGET TO BE USED IN RF SPUTTERING APPARATUS

摘要

The present invention uses an RF sputtering device to form an organic thin film layer for OLED. Accordingly, a method of manufacturing an organic thin film layer for OLED using an RF sputtering device according to the present invention includes: disposing a target for manufacturing an OLED organic thin film layer on a cathode inside a chamber of the RF sputtering device; Maintaining the inside of the chamber in a vacuum and then injecting a reaction gas; And applying a magnetic field and RF power to the target.