Method of accelerated life test of internal-plasma ceramics

摘要

The present invention relates to an accelerated life test method of plasma-resistant ceramics, and more particularly, it is essential to use a material having superior plasma resistance compared to quartz, which is the most widely used material in current display CVD process equipment. As a result, when performing a wear test of plasma-resistant materials, by setting the life test time according to the acceleration coefficient and verifying it through the plasma-resistant test, the test time is narrowed and the test time is shortened. Provides a method for testing accelerated life of ceramics.