MANUFACTURING METHOD OF MICROLENS ARRAY AND MICROLENS ARRAY MANUFACTURING SYSTEM

摘要

A method of manufacturing a microlens array using a laser is disclosed. The method includes the steps of applying a laser to a substrate used as a material with an intensity of an intensity that does not show a physical change of the substrate with the laser; And performing an etching process on the substrate to which the laser is applied. In the step of applying the laser, the laser may be sequentially applied from a lower surface to an upper surface of the substrate.