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A coating method of a quench sleeve of an exhaust gas treatment scrubber and a quench sleeve

机译:废气处理洗涤器的急冷套筒和急冷套筒的涂布方法

摘要

Disclosed are a method of coating a quench sleeve of a waste gas treatment scrubber and a quench sleeve produced thereby. According to the embodiment, in the coating method of the quench sleeve of the waste gas treatment scrubber, while supplying the coating powder to the surface of the object and irradiating a laser beam, the coating powder is instantaneously melted and coated on the surface of the object. According to this, a coating layer is formed on the inner and outer sides of the quench sleeve (quenching unit) of the gas scrubber for treating the waste gas generated in the OLED / LCD manufacturing fixture, to prevent corrosion by HF / F2 gas. By preventing adhesion to the base material and the generation of pores of the coating layer, there is no peeling phenomenon at high temperatures, and there is an effect that the durability can be significantly improved.
机译:公开了涂覆废气处理洗涤器的骤冷套筒的方法和由此产生的骤冷套筒。根据实施例,在废气处理洗涤器的淬火套筒的涂覆方法中,在将涂覆粉末供应到物体的表面并照射激光束的同时,将涂覆粉末瞬时熔化并涂覆在容器的表面上。目的。据此,在气体洗涤器的淬火套筒(淬火单元)的内侧和外侧形成涂层,以处理在OLED / LCD制造夹具中产生的废气,以防止HF / F2气体腐蚀。通过防止对基材的粘附和涂层的孔的产生,在高温下没有剥离现象,并且具有可以显着提高耐久性的效果。

著录项

  • 公开/公告号KR102063335B1

    专利类型

  • 公开/公告日2020-01-09

    原文格式PDF

  • 申请/专利权人 (주)에코엔텍;

    申请/专利号KR20170177348

  • 发明设计人 이영춘;

    申请日2017-12-21

  • 分类号C23C26/02;B01D47;H01L21/67;

  • 国家 KR

  • 入库时间 2022-08-21 11:05:35

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