In the multi-charged particle beam exposure method of one embodiment of the present invention, a plurality of divided shots corresponding to a plurality of preset control irradiation times for each beam are combined using a multi-beam by a charged particle beam, and the above-described continuous irradiation is performed at the same irradiation position. Charged particle beams along the divided shots for each divided shot in the case where exposure of the desired irradiation time is performed at the irradiation position of each beam for each pass representing each exposure processing in the multiple exposures by performing a plurality of divided shots of the combination. In the case of exposure by the charged particle beam along the combination of the divided shots corresponding to the control irradiation time for each control irradiation time, using the previously obtained blanking error time resulting from the error of the blanking control when exposure by the The effective irradiation time is calculated and correlation data indicating the relationship between the control irradiation time and the effective irradiation time is created. By using the correlation data, the combination of the divided shots corresponding to the effective irradiation time closer to the desired irradiation time for each irradiation position of the sample is selected, and the combination of the divided shots selected for each irradiation position of the sample using the multi-beam is used. It is characterized by performing exposure.
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