POU POU scrubber plasma torch and semiconductor waste gas treatment apparatus comprising the same

摘要

The present invention relates to a POU scrubber plasma torch and a semiconductor waste gas treatment apparatus including the same, capable of improving plasma decomposition efficiency. The POU scrubber plasma torch of the present invention comprises: a torch tube body; an electrode unit provided to cause plasma discharge; a coolant supply unit for supplying a coolant to a central part of the electrode unit; a coolant discharge unit provided to discharge the coolant from the central part of the electrode unit; and a reaction water injection unit.