STRUCTURE FOR SPRAYING NITROGEN GAS TO WAFER FOR EFEM AND EFEM HAVING STRUCTURE FOR SPRAYING NITROGEN GAS TO WAFER FOR EFEM

摘要

A disclosed structure of spraying nitrogen gas to a wafer for an EFEM includes an EFEM back wall and a nitrogen gas spraying unit, thereby enabling the nitrogen gas sprayed from the nitrogen gas spraying unit to be intensively sprayed toward the wafer discharged to the front of a load lock chamber unit and enabling the wafer discharged to the front of the load lock chamber unit to be purged and cooled by the nitrogen gas. Therefore, a phenomenon such that remaining gas on the wafer reacts in the EFEM so that by-products are formed is prevented.;COPYRIGHT KIPO 2020