TOF MS TOF MS gas mass analysis monitoring system for semiconductor process chamber and gas line

摘要

The present invention relates to a time-of-flight mass spectrometer (TOF MS) gas mass spectrometry monitoring system for gas analysis of semiconductor process chambers and gas lines, and more specifically, a TOF MS (time-of-flight mass spectrometer). The present invention relates to a TOF MS gas mass spectrometry monitoring system for gas analysis of a semiconductor process chamber and a gas line to uniformly manage a gas process in a semiconductor process by using it exclusively for monitoring the chamber and gas line of a semiconductor process.