CLASSIFIER READINESS AND MAINTENANCE IN AUTOMATIC DEFECT CLASSIFICATION

摘要

The method for classification comprises receiving inspection data associated with a plurality of defects found in one or more samples and receiving one or more benchmark classifications including a class for each of the plurality of defects. Includes. The preparation criteria for one or more of the classes are evaluated based on one or more benchmark classification results, and the preparation criteria determine the suitability of the inspection data for training the automatic defect classifier for the class, for each class. Includes. Part of the inspection data is selected corresponding to one or more defects associated with one or more classes that meet the preparatory criteria. One or more automatic classifiers are trained on one or more classes that meet the preparatory criteria using a selected portion of the test data.