A manufacturing apparatus for manufacturing a fluorine resin packing used in semiconductor manufacturing a manufacturing method of a fluorine resin packing for semiconductor manufacturing using the manufacturing apparatus and a fluorine resin packing for semiconductor manufacturing using the manufacturing method

摘要

The present invention is a plurality of packing support portion for supporting the inner peripheral surface of the fluorine resin packing member having a hollow; A holder provided in the center of the plurality of packing supports; A connecting portion connecting the plurality of packing supports to the holder; It relates to an apparatus for manufacturing a fluorine resin packing member for semiconductor manufacturing, characterized in that it comprises; a pressing part for pressing the plurality of packing support so that the plurality of packing support parts are spaced apart from the holder and in close contact with the inner circumferential surface of the fluorine resin packing member. .