FEEDBACK CONTROL AND COHERENCY OF MULTIPLE POWER SUPPLIES IN RADIO FREQUENCY POWER DELIVERY SYSTEMS FOR PULSED MODE SCHEMES IN THIN FILM PROCESSING

摘要

A radio frequency power supply system for delivering periodic radio frequency power to a load is disclosed. The power amplifier outputs a radio frequency signal to the load. The sensor measures the radio frequency signal provided by the load and outputs signals that change according to the radio frequency signal. The first feedback loop enables control of the radio frequency signal based on signals determined according to the output from the sensor. The second feedback loop enables control of the radio frequency signal based on energies measured according to the signals output from the sensor. Energy amplitude and duration provide control values for changing the radio frequency signal. Control systems and techniques are applicable to pulsed radio frequency power supplies and in many cases continuous wave power supplies.