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Application of diode boxes to reduce crazing in glass coatings

机译:二极管盒在减少玻璃涂层裂纹方面的应用

摘要

Systems, methods, and apparatus for reducing crazing in thin film stacks deposited on large area substrates, such as glass, eg, architectural glass, are disclosed. Creasing can occur once a conductor-insulator-conductor series of films is deposited, effectively forming a capacitor, where the substrate spans multiple deposition chambers, and such coupling between chambers results in an effective capacitor voltage. Can cause the dielectric layer between the two conductor layers to break. The resulting crazing can be reduced and otherwise eliminated through grounding of the outputs of the AC power supply to assist in the deposition of one of the conductor layers. Grounding is through rectified channels such as diodes, or series of diodes, so that it is impossible for the AC power supply to drop below the ground potential.
机译:公开了用于减少沉积在大面积基板(例如玻璃,例如建筑玻璃)上的薄膜叠层中的裂纹的系统,方法和设备。一旦沉积了一系列的导体-绝缘体-导体膜,就可以有效地形成电容器,其中基板跨越多个沉积室,并且室之间的这种耦合会产生有效的电容器电压。可能导致两个导体层之间的介电层破裂。通过将交流电源的输出端接地以帮助导体层之一的沉积,可以减少并消除产生的裂纹。接地是通过诸如二极管或一系列二极管之类的整流通道进行的,因此交流电源不可能降到接地电位以下。

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