首页> 外国专利> 13 13 PERIODIC TABLE GROUP 13 METAL NITRIDE CRYSTALS AND METHOD FOR MANUFACTURING PERIODIC TABLE GROUP 13 METAL NITRIDE CRYSTALS

13 13 PERIODIC TABLE GROUP 13 METAL NITRIDE CRYSTALS AND METHOD FOR MANUFACTURING PERIODIC TABLE GROUP 13 METAL NITRIDE CRYSTALS

机译:13 13周期表第13金属氮化物晶体及其制造方法13周期表

摘要

The metal nitride crystals of Group 13 of the periodic table grown with a non-polar surface or a semi-polar surface as a main surface have many lamination defects. An object of the present invention is to provide a metal nitride crystal of Group 13 of the periodic table that suppresses the occurrence of such lamination defects. In the intensity profile in the Qx direction including the maximum intensity derived from the isotropic diagram obtained by the (100) plane X-ray inverse lattice mapping of the crystal, the Qx width representing 1/300 intensity value with respect to the peak intensity value is 6×10 The problem is solved by Group 13 metal nitride crystals of the periodic table of -4 rlu or less.
机译:以非极性表面或半极性表面为主表面生长的周期表的第13族金属氮化物晶体具有许多层压缺陷。本发明的目的是提供一种抑制这种叠层缺陷的发生的周期表第13族的金属氮化物晶体。在Qx方向的强度分布图中,该强度分布包括从通过晶体的(100)面X射线逆晶格映射获得的各向同性图得出的最大强度,其中Qx宽度表示相对于峰值强度值的1/300强度值是6×10 问题可以通过 -4 rlu或更短周期表中的13族金属氮化物晶体解决。

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