Normal-incidence and non-normal-incidence combination ellipsometer and method for measuring optical properties of the sample using the same

摘要

The present invention relates to an ellipsometer combined with vertical incidence and oblique incidence and a method for measuring the mineral properties of a specimen using the same. An object of the present invention is to replace the wavelength-dependent compensator with a linearly polarized wavelength-independent compensator in the vertical incident ellipsometer structure, thereby simplifying the calibration procedure of the instrument and at the same time making it easy to realize the measurement wavelength region expansion. , To provide a combined vertical and inclined incident ellipsometer and a method for measuring the mineral properties of a specimen using the same. Another object of the present invention, by measuring the mineral properties using an ellipsometer in the form of a combination of a vertical incidence-type ellipsometer and an inclined-incidence ellipsometer, the reliability of the analysis results by obtaining more measurement values for the specimen in various ways It is to provide a method for measuring the mineral properties of a specimen using the ellipsometer combined with a vertical incidence and an inclined incidence, which enables the improvement of.