METHOD FOR PROVIDING A MAGNETIC JUNCTION AND A MAGNETIC MEMORY ON A SUBSTRATE USABLE IN A MAGNETIC DEVICEAND THE MAGNETIC JUNCTION

摘要

A method of providing a magnetic junction and a magnetic memory on a substrate that can be used in a magnetic device and a magnetic junction are provided. The method of providing a magnetic junction that can be used in a magnetic device on a substrate is to provide a free layer that can be switched between a plurality of stable magnetic states when a write current flows through the magnetic junction, and is nonmagnetic. Providing a spacer layer and providing a pinned layer, wherein the nonmagnetic spacer layer is disposed between the free layer and the pinned layer, and at least one of providing a free layer and providing a pinned layer One includes a plurality of steps, the plurality of steps included in providing the free layer includes a first plurality of steps, and the plurality of steps included in providing the pinned layer includes a second plurality of steps However, in the first plurality of steps, depositing a first region of the free layer, depositing a first sacrificial layer, and annealing at least the first region and the first sacrificial layer of the free layer at a first temperature greater than 25 degrees Celsius And, removing the first sacrificial layer, and depositing a second region of the free layer, and the second plurality of steps includes depositing a first region of the fixed layer, depositing a second sacrificial layer, and at least Annealing the first region and the second sacrificial layer at a second temperature greater than 25 degrees Celsius, defining a magnetic junction region including a first region of a free layer, a nonmagnetic spacer layer, and a pinned layer, and a second sacrificial layer And depositing a second region of the pinned layer.