Plasma reactor power division system and power division method using the same

摘要

The present invention relates to a remote plasma chamber power branching system and a power branching method using the same, and more particularly, to a remote plasma chamber power branching system for supplying RF power to a plurality of remote plasma chambers, and a power branching method using the same. The present invention includes a plurality of process chambers 100 having a processing space S for processing a substrate therein; A gas supply unit for supplying gas to the processing space (S); A plurality of remote plasma chambers 200 installed to correspond to each of the plurality of process chambers 100 and for supplying activated gas into the process chamber 100; A power distribution unit 300 for branching and supplying RF power from a single power supply unit 10 to the plurality of remote plasma chambers 200; Disclosed is a remote plasma chamber power distribution system comprising a control unit 500 for controlling distribution of power supplied from the power distribution unit 300 to the remote plasma chamber 200