SUBSTRATE TEMPERATURE CONTROL APPARATUS INCLUDING OPTICAL FIBER HEATING SUBSTRATE TEMPERATURE CONTROL SYSTEMS ELECTRONIC DEVICE PROCESSING SYSTEMS AND METHODS

摘要

A substrate temperature control apparatus including optical fiber temperature control is described. The substrate temperature control apparatus includes a base, a thermal contact member proximate to the base, and a plurality of optical fibers adapted to provide light-based heating while extending laterally between the base and the thermal contact member. Substrate temperature control systems, and electronic device processing systems, and methods including optical fiber temperature control, are described, as in many other aspects.