Photo mask structures for manufacturing multi-layered micro-pattern body and multi-layered micro-pattern body manufacturing method using the same

摘要

A photo mask structure for manufacturing a multi-fine pattern body and a method of manufacturing a multi-fine pattern body using the same are disclosed. The photomask structure for manufacturing a multi-fine pattern body according to the present invention is a transparent and flexible flexible substrate capable of transmitting light, and a partial light shielding formed on the upper surface of the flexible substrate by blocking light. It characterized in that it comprises a first pattern layer for the first pattern layer, and a second pattern layer that is a physical irregularity having a predetermined height formed on the upper surface of the first pattern layer. In the photomask structure for manufacturing a multi-fine pattern body according to the present invention, a partial light-shielding layer and a physical uneven layer are formed on a flexible substrate, so that roll-coating lamination is possible in a subsequent process, and multiple layers can be laminated with only one exposure and development. Since it is possible to manufacture a fine pattern body having a pattern of, it can greatly contribute to quality stabilization and cost reduction, reducing manufacturing man-hours.