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METHOD OF ESTIMATING SURFACE PROFILE PARAMETERS BASED ON PROBABILISTIC-STATISTICAL CLASSIFICATION OF THE PROFILOGRAM SPECTRUM

机译:基于prologlogram谱的概率统计分类的表面轮廓参数估计方法

摘要

FIELD: information technology.;SUBSTANCE: invention relates to evaluation of surface structure based on profile information. Technical result is achieved due to the fact that at the training stage for each profile type a plurality of samples is prepared, the profilograms are removed from the surfaces of the samples, the profilogram of the surface is presented in form of a signal, obtaining a signal spectrum, using sequences of spectral coefficients as class standards corresponding to the type of surface, probabilistic model is trained on a set of samples with clustering of the profilogram spectrum, obtaining statistical estimates of parameters of the model of the class, classifying the profilogram spectrum by selecting a model with the maximum likelihood value, wherein at the learning stage, the probabilistic model is adapted to specific features of the profilogram spectrum by using an arbitrary metric clustering algorithm, classes are formed by grouping sample profiles by one or a set of parameters of surface quality or surface properties, and evaluation of profile parameters is performed as a procedure for classifying the spectrum of a profilogram.;EFFECT: possibility of taking into account complete information on surface profile by analyzing spectral coefficients of profilogram.;1 cl, 4 dwg
机译:技术领域本发明涉及基于轮廓信息的表面结构评估。由于在训练阶段针对每种轮廓类型准备了多个样品,从样品表面去除了轮廓图,以信号形式显示了表面轮廓,从而获得了技术成果。信号频谱,使用频谱系数序列作为与表面类型相对应的分类标准,对具有概率分布图谱聚类的一组样本训练概率模型,获得该类别模型参数的统计估计,对概率分布图谱进行分类通过选择具有最大似然值的模型,其中在学习阶段,通过使用任意度量聚类算法将概率模型适应于轮廓图谱的特定特征,通过按一个或一组参数对样本配置文件进行分组来形成类别表面质量或表面特性的评估,以及轮廓参数的评估是作为对轮廓图的光谱进行分类;效果:通过分析轮廓图的光谱系数来考虑表面轮廓的完整信息的可能性。1cl,4 dwg

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