METHOD OF PRODUCING THIN-FILM MATERIALS BASED ON SILICON, PHOSPHORUS, CALCIUM AND MAGNESIUM OXIDES

摘要

FIELD: technological processes.;SUBSTANCE: invention relates to production of thin-film coatings used in various fields of technology, including as bioactive material. Method of producing thin-film materials based on composite oxide systems involves preparing a film-forming solution based on 96 wt% ethyl alcohol, calcium nitrate and magnesium nitrate, tetraethoxysilane, orthophosphoric acid followed by deposition on the substrate by centrifugation at a centrifuge rotation speed of 3,000 rpm and stepped heat treatment at 60 °C for 30 minutes, 800 °C for 1 hour, wherein preparation of the film-forming solution is carried out in the following order: total weight content of additives and amount of 96 % of ethyl alcohol required to obtain the desired film-forming solution are calculated, in the calculated amount of ethyl alcohol is dissolved successively a) calcium nitrate in amount of 2.0–5.1 wt%, b) magnesium nitrate in amount of 1.2–4.6 wt%, c) tetraethoxysilane in amount of 4.6 wt%, after which orthophosphoric acid is added in amount of 0.32 wt%.;EFFECT: invention reduces time for obtaining thin-film material and removes impurity ions from the film.;1 cl, 2 ex