MASS SPECTROMETRIC LEAK DETECTOR WITH TURBOMOLECULAR PUMP AND BOOSTER PUMP ON COMMON SHAFT

摘要

FIELD: physics.;SUBSTANCE: mass spectrometric leak detector having multi-stage turbomolecular pump (12), connected to suction side of turbomolecular pump (12) mass spectrometer (17), connected to turbomolecular pump delivery side (12), pre-vacuum pump (18) and booster pump stage (24), suction side of which includes connection (28) for verifiable object to be inspected, and discharge side of which is connected through pipeline piping (22) to delivery side of turbomolecular pump (12) and suction side of pre-rarefaction pump (18), characterized in that stages (30, 32) of turbomolecular pump (12) and the booster pump stage are located on the common shaft and have common drive (34) and that pipeline layout between the delivery side connected to the inspected object by the booster pump stage, and suction side connected to mass spectrometer (17) of turbomolecular pump (12) pumping stage, is separated by partition wall (36).;EFFECT: disclosed are a mass spectrometric leak detector with a turbomolecular pump and a booster pump on a common shaft.;10 cl, 5 dwg