METHOD OF PRODUCING GAS-ANALYTICAL MULTI-SENSOR CHIP BASED ON ZINC OXIDE NANORODS

摘要

FIELD: nanotechnology.;SUBSTANCE: invention relates to the field of sensor technology and nanotechnology, in particular to the development of the chemoresistive multi-sensor lines used for selective gas detection. Method of producing a gas-analytic multi-touch chip comprising a dielectric substrate, on the front side of which a set of coplanar strip electrode electrodes is deposited from a noble metal, a nanostructured layer of zinc oxide and thin-film thermistors, and on the reverse side is a set of thin-film meander heaters, at that, at the first stage, a nucleating layer of zinc oxide nanoparticles is applied, which is annealed at temperatures of about 300–400 °C for 15–30 minutes; at the second step, a substrate with a deposited nucleated layer is placed in a solution containing zinc cations and hydroxide ions in equal proportions and held at 75–95 °C for 30–180 minutes; substrate with formed zinc oxide nanorods is washed with distilled water, dried at room temperature and annealed for 15–30 minutes at temperature of 300–400 °C.;EFFECT: invention enables manufacture of a low-cost gas analytic multi-touch chip which operates efficiently at temperature of 400 °C, capable of selective detection of organic vapours.;4 cl, 7 dwg