SEMICONDUCTOR PRESSURE CONVERTER WITH HIGH ACCURACY AND SENSITIVITY

摘要

FIELD: measuring equipment.;SUBSTANCE: invention relates to measurement equipment, in particular to semiconductor pressure converters, and can be used in development and manufacture of small-size sensors of low pressures. Summary: semiconductor pressure converter comprises rigid silicon membrane, section profile of which is a combination of wide and narrow sections located symmetrically relative to vertical axis of section, ratio of width of sections is 3.6:1, and the coordinate of the conjugation point of the sections is determined by the relationship Y = 0.567 R, where R is the membrane radius. On the upper part of the membrane there are tensoresistors, which are combined into a full bridge circuit.;EFFECT: technical result consists in improvement of accuracy and sensitivity of pressure transducer.;1 cl, 5 dwg