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Microscopic device and microscopic method for the three-dimensional localization of punctiform objects

机译:点状物体三维定位的显微装置和显微方法

摘要

Microscopic device (10) for the three-dimensional localization of point-like objects (14, 16), comprising: two imaging optics (12, 26, 26 ') which each position one and the same point-like object (14, 16) arranged in an object space (18) Image the form of a focus light distribution (40, 40 ', 42, 42') in two separate image spaces (34), two detector units (28, 28 '), each of which is assigned to one of the two imaging optics (12, 26, 26') and in Detection points of a detection surface (27, 27 ') lying in the respective image space (34) detect an evaluable light spot (54, 54') which represents a plane section through the respective focus light distribution (40, 40 ', 42, 42'), and Evaluation unit (60), which sets the detection points of the two detection surfaces (27, 27 ') in pairs in correspondence with one another and by evaluating the two light spots (54, 54') taking into account this detection point correspondence, a lateral xy position of the point-shaped Ob projectes (14, 16) within an object plane lying in the object space (18) and an axial z-position of the point-like object (14, 16) in the direction of an optical axis (O1) perpendicular to the object plane, characterized in that the both imaging optics (12, 26, 26 ') each have an optical means (26, 26') which the respective focus light distribution (40, 40 ', 42, 42') at an angle to one in the respective imaging optics (12, 26, 26 ') aligns the detection axis (36) provided, which is perpendicular to the detection surface (27, 27') of the respective detection unit (26, 26 '), the inclined positions of the two focus light distributions (40, 40) caused by the optical means (26, 26') ', 42, 42') are opposed to each other in such a way that the two light spots (54, 54 ') with a change in the z-position of the point-like object (14, 16) in their respective detection surfaces (27, 27') take into account counter to the detection point correspondence move, and the evaluation unit (60) determines the axial z-position of the point-like object (14, 16) on the basis of the relative position of the two light spots (54, 54 ').
机译:用于对点状对象(14、16)进行三维定位的显微装置(10),包括:两个成像光学元件(12、26、26'),每个分别定位一个和相同的点状对象(14、16) )布置在物体空间(18)中)在两个单独的图像空间(34)中形成聚焦光分布(40、40',42、42')的形式,两个探测器单元(28、28')被分配给两个成像光学器件(12、26、26')中的一个,并且在位于相应图像空间(34)中的检测表面(27、27')的检测点中检测可评估的光斑(54、54'代表通过相应聚焦光分布(40、40',42、42')的平面截面的)和评估单元(60),评估单元将两个检测面(27、27')的检测点成对设置彼此对应并通过考虑到该检测点对应来评估两个光点(54、54'),点形Ob投影(14、16)的横向xy位置在位于物体空间(18)中的物体平面中,以及点状物体(14、16)在垂直于物体平面的光轴(O1)方向上的轴向z位置,其特征在于成像光学器件(12、26、26')分别具有一个光学装置(26、26'),其相应的聚焦光分布(40、40',42、42')与各个成像光学器件(12)中的一个成一定角度,26、26')将设置的垂直于相应检测单元(26、26')的检测表面(27、27')的检测轴(36)与两个聚焦光分布(由光学装置(26、26')',42、42')引起的图40、40)彼此相对,使得两个光斑(54、54')的z位置改变考虑到点状对象(14、16)在其各自的检测表面(27、27')中的位置与检测点对应移动相反,评估单元(60)确定轴向z位置基于两个光斑(54、54')的相对位置,确定点状物体(14、16)的光程。

著录项

  • 公开/公告号DE102011053232B4

    专利类型

  • 公开/公告日2020-08-06

    原文格式PDF

  • 申请/专利权人 LEICA MICROSYSTEMS CMS GMBH;

    申请/专利号DE20111053232

  • 发明设计人 MARCUS DYBA;

    申请日2011-09-02

  • 分类号G02B21/18;G02B21;

  • 国家 DE

  • 入库时间 2022-08-21 11:02:13

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