Continuous furnace and die bonder with a continuous furnace

摘要

Continuous furnace, comprising a furnace body (2) and a cover (6) which enclose a channel through which substrates can be transported and to which a working gas can be fed, the cover (6) having at least one process opening (10), the furnace body (2) and the cover (6) comprise one or more individual parts that are detachably connected to one another, connecting points between the individual parts are designed as flat connections with mutually opposite joining surfaces (11, 12), and at least some of the connecting points have a groove (13 , 15,20, 22).