Method of making a magnetic structure and device

摘要

A method comprising the following steps: providing a substrate (10) and producing at least two spaced apart cavities (11a, 11b) in the substrate (10), each cavity (11) having an aspect ratio (l / d) of at least 6: 1 at a depth (I) of at least 50 µm, filling the cavities (11) with magnetic particles (12), the magnetic particles (12) coming into contact with one another and cavities being formed between the contact points, and connecting at least one Part of the magnetic particles (12) at their contact points by coating the magnetic particles (12), the cavities being at least partially penetrated by the layer produced during coating, so that the connected magnetic particles (12) form a magnetic porous structure (13) ,