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Micro-electro-mechanical system (MEMS) circuit and method for reconstructing a disturbance variable

机译:用于重建干扰变量的微机电系统和方法

摘要

A micro-electro-mechanical system (MEMS) circuit (302) comprising: • a MEMS device (304; 404; 504; 604) comprising at least one sensor configured to generate a MEMS signal; a control circuit (202; 312; 418; 514; 612) configured to detect a switched-on or switched-off state of at least one device and to generate a control signal at least partially depending on the switched-on or switched-off state; a reconstruction filter (204 ; 318; 424; 520; 618), set up to determine an interference signal, which can be partially generated by the at least one device in the switched-on state, using the generated control signal; and • a subtracter (320; 426; 522) configured to subtract the detected interference signal from the MEMS signal, wherein the control circuit (202; 312; 418; 514; 612) is further configured such that after deactivation of the at least one Device the control signal can be generated for a predefined time.
机译:一种微机电系统(MEMS)电路(302),包括:•MEMS器件(304; 404; 504; 604),包括至少一个被配置为产生MEMS信号的传感器;以及控制电路(202; 312; 418; 514; 612),其被配置为检测至少一个设备的开启或关闭状态,并至少部分地取决于开启或关闭来生成控制信号州;重建滤波器(204; 318; 424; 520; 618),被设置为使用产生的控制信号来确定干扰信号,该干扰信号可以由至少一个处于接通状态的设备部分地产生; ·减法器(320; 426; 522),被配置为从MEMS信号中减去检测到的干扰信号,其中,控制电路(202; 312; 418; 514; 612)还被配置为使得在至少一个去激活之后设备可以在预定时间内生成控制信号。

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