Processes and systems for high-speed generation of structures on surfaces with a pulsed laser beam

摘要

In this present application, methods for high-speed generation of surface structures with a pulsed laser beam are given. The central idea is that the surface with structures is divided into several surface elements, the surface elements having an elongated shape with a length of L and a width of W. A beam source that emits a pulsed laser beam is used to structure the surface. A deflection system is used to scan the laser beam. The deflection system has a first deflection element which directs the laser beam along the length of a surface element. The deflection system has a second deflection element, which has a very high dynamic. The second deflecting element deflects the laser beam according to a specification according to the length. Furthermore, the deflection system has a third deflection element. The third deflection element directs the laser beam from one surface element to another surface element. This scans the entire surface area by area and the specified structures are created on the entire surface.