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Computer-generated hologram (CGH), as well as methods for characterizing the surface shape of an optical element
Computer-generated hologram (CGH), as well as methods for characterizing the surface shape of an optical element
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机译:计算机生成的全息图(CGH)以及表征光学元件表面形状的方法
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摘要
The invention relates to a computer-generated hologram (CGH) and to a method for characterizing the surface shape of an optical element. According to one aspect, a CGH has a first region (121, 321, 421) having at least one useful structure (A) and a second region (122, 322, 422) spatially separated from this first region (121, 321, 421) this second area forms a control area for detecting a contamination forming on the CGH (120, 320, 420, 520).
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