Micromechanical component and method for operating a micromechanical component

摘要

A method for operating a micromechanical component is proposed, the micromechanical component having a mass oscillator and a drive structure, the drive structure being configured to excite a non-linear drive oscillation of the mass oscillator, the drive oscillation having a base frequency for small amplitudes and a frequency for larger amplitudes The frequency of the drive vibration is adjusted to a target frequency by adjusting the amplitude of the drive vibration, the target frequency being greater or less than the base frequency. A micromechanical component comprising a mass oscillator and a drive structure is also proposed , wherein the drive structure is configured to excite a non-linear drive vibration of the mass oscillator.