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Mirrors, in particular for a microlithographic projection exposure system, and method for operating a deformable mirror

机译:特别是用于微光刻投影曝光系统的反射镜以及用于操作可变形反射镜的方法

摘要

The invention relates to a mirror, in particular for a microlithographic projection exposure system, and to a method for operating a deformable mirror. According to one aspect of the invention, a mirror has an optical active surface (11), a mirror substrate (12), a reflection layer stack (21) for reflecting electromagnetic radiation impinging on the optical active surface (11), and at least one piezoelectric layer (16), which is arranged between the mirror substrate (12) and the reflection layer stack (21) and via a first electrode arrangement located on the side of the piezoelectric layer (16) facing the reflection layer stack (21) and a second side of the piezoelectric layer facing the mirror substrate (12) (16) located electrode arrangement with an electric field to generate a locally variable deformation, said piezoelectric layer (16) having a plurality of columns spatially separated from one another by column boundaries, with an average column diameter of these columns being in the range from 0.1 μm to 50 μm ,
机译:本发明涉及一种镜,特别是用于微光刻投影曝光系统的镜,并且涉及一种用于操作可变形镜的方法。根据本发明的一个方面,镜子具有光学活性表面(11),镜子基板(12),用于反射入射在光学活性表面(11)上的电磁辐射的反射层堆叠(21)。一个压电层(16),其布置在镜面基板(12)和反射层堆叠(21)之间,并通过第一电极布置,该第一电极布置位于压电层(16)面对反射层堆叠(21)的一侧上压电层的第二侧面面对带有电极的镜面基板(16)(16),该电极布置具有电场以产生局部可变的变形,所述压电层(16)具有多个列,这些列在空间上彼此隔开边界,这些色谱柱的平均色谱柱直径在0.1μm至50μm的范围内,

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