METHODS AND SYSTEMS FOR AVERAGE INLINE TESTING OF COMPONENTS AND LATENT RELIABILITY OF DEFECTIVE DETECTION

摘要

Methods and systems for inline averaging of parts and latent reliability failure detection or detection are disclosed. An average test procedure for inline parts may include: performing inline inspection and inline metrology on a plurality of wafers at multiple critical steps during wafer manufacture; Aggregating inspection results obtained from inline inspection and inline metrology using one or more processors to obtain a plurality of aggregated inspection results for the plurality of wafers; Identifying one or more statistical outliers among the plurality of wafers based at least in part on the plurality of aggregate inspection results obtained for the plurality of wafers; and controlling the one or more statistical outliers prior to entering a supply chain for a downstream manufacturing process, or sorting out the one or more statistical outliers for further evaluation, testing or reclassification.