Manufacturing process of silicon heterojunction solar cells with a stabilization step and a production line section for the stabilization step

摘要

The present invention relates to manufacturing processes for silicon heterojunction solar cells with at least one stabilization step, the stabilization step being carried out after amorphous silicon layers, and preferably also transparent layers or even metallic contact materials, have previously been applied to crystalline silicon solar wafers. The object of the invention is to find an efficient stabilization step that enables high solar cell efficiencies. The object is achieved by manufacturing processes for silicon heterojunction solar cells, in which the stabilization step includes heating the solar cell to temperatures above 200 ° C and lighting from a light source, the light source emitting light in a wavelength range 2500 nm and one of The light dose emitted by the light source is more than 8000 Ws / m2.