Process for producing a vitreous body with through-channels

摘要

The invention relates to a method for producing a glass body (1) which has at least one through channel (2), comprising: introducing at least one tubular or wire - shaped body (4) made of a temperature - resistant material into a container (3), filling in liquid glass material ( 6) in the container (3) for embedding the tubular or wire-shaped body (4) in the glass material (6), cooling the glass material (6) below the solidification temperature (T) to produce the glass body (1), and forming the at least one Through channel (2) by removing the at least one tubular or wire-shaped body (4) from the solidified glass material (6) of the glass body (1). The invention also relates to a reflective optical element, in particular an EUV mirror, which has a substrate with at least one through channel (2), which was produced from such a glass body (1), and an optical arrangement, in particular an EUV lithography system at least one such optical element.