Method for voltage contrast imaging with a corpuscular multi-beam microscope, corpuscular multi-beam microscope for voltage contrast imaging and semiconductor structures for voltage contrast imaging with a corpuscular multi-beam microscope

摘要

The invention comprises a method, a multi-beam particle microscope, and semiconductor structures to charge a semiconductor sample using a plurality of multi-beam particle beams of a multi-beam particle microscope and perform high-resolution voltage contrast imaging without having to switch the multi-beam particle microscope or move the semiconductor sample. In this case, an additive total current from the sum of selected corpuscular beams, each with a low corpuscular current, causes a charge and thus a voltage difference in the semiconductor structure.