An imaging optic is used to image an object field in an object plane in an image field (8) in an image plane (9). The imaging optics have a plurality of mirrors (M3, M5, M6) for guiding imaging light (3) along a beam path between the object field and the image field (8). A mirror substrate (21) of at least one of the mirrors (M5) interacts with a deformation device (23) for the controlled introduction of deformations into a reflective surface (22) of the mirror (M5) to compensate for deformations of the penultimate mirror (M5). A control / regulating device (25) is in signal connection with the deformation device (23). The result is imaging optics in which, while adhering to specified tolerances for maximum imaging errors, transmission losses of an exposure system, of which the imaging optics is a component, are kept as low as possible.
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