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Method for manufacturing at least one semiconductor structure with spiral separation layer of growth substrate

机译:具有生长衬底的螺旋分离层的至少一个半导体结构的制造方法

摘要

The invention relates to a method (11) for preparing at least one "(20)" semiconductor structure separated from a support substrate,2. Including the following steps: Manufacturing "- core layer" ("13") from support substrate;-Fabrication of semiconductor structures from nuclear epitaxy(-Obtaining a first electrode (30 ") located in a side region (" 3 ") at the edge of the semiconductor structure;-The arrangement of the structure formed in the 'water electrolyte' (` 50 ') bath;-Application of potential difference between electrodes (..., 30, 40)Until the semiconductor structure is detached from the support substrate (11.0.0)“(
机译:本发明涉及一种用于制备从支撑衬底2分离的至少一个“(20)”半导体结构的方法(11)。包括以下步骤:从支撑衬底上制造“-核心层”(“ 13”);-从核外延制造半导体结构(-在半导体衬底的侧面区域(“ 3”)中获得第一电极(30))。半导体结构的边缘;-在'水电解质'('50')浴中形成的结构的布置;-在电极之间施加电势差(...,30,40)直到半导体结构与电极分离支撑基板(11.0.0)”(

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