首页>
外国专利>
Method for manufacturing at least one semiconductor structure with spiral separation layer of growth substrate
Method for manufacturing at least one semiconductor structure with spiral separation layer of growth substrate
展开▼
机译:具有生长衬底的螺旋分离层的至少一个半导体结构的制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The invention relates to a method (11) for preparing at least one "(20)" semiconductor structure separated from a support substrate,2. Including the following steps: Manufacturing "- core layer" ("13") from support substrate;-Fabrication of semiconductor structures from nuclear epitaxy(-Obtaining a first electrode (30 ") located in a side region (" 3 ") at the edge of the semiconductor structure;-The arrangement of the structure formed in the 'water electrolyte' (` 50 ') bath;-Application of potential difference between electrodes (..., 30, 40)Until the semiconductor structure is detached from the support substrate (11.0.0)“(
展开▼