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MICRO-FLUIDIC DEVICE SUITABLE FOR MODIFYING THE PHASE OF A WAVEFRONT AND OPTICAL SYSTEM COMPRISING SUCH A DEVICE
MICRO-FLUIDIC DEVICE SUITABLE FOR MODIFYING THE PHASE OF A WAVEFRONT AND OPTICAL SYSTEM COMPRISING SUCH A DEVICE
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机译:适用于修改包括此类设备的波前和光学系统相位的微流体设备
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摘要
The invention relates to a microfluidic device (10) comprising: -a substrate (Sub) on which are arranged walls (W) delimiting a plurality of adjoining chambers (Chi), -a flexible membrane (Memb) deposited and fixed on the walls so as to form closed chambers, the chambers being intended to be filled with fluid, -at least one channel (CAi) connected to each chamber, said channel being connected to only one chamber, a channel being intended activating the associated chamber by applying a determined pressure to the fluid in said chamber, so as to locally create an elastic deformation of said membrane.
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