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Method for manufacturing a detection structure with an optimized absorption rate and said structure

机译:具有最佳吸收率的检测结构的制造方法和所述结构

摘要

The invention relates to a method for forming an electromagnetic radiation detection structure (10) comprising a MOS transistor (100) as a transducer. The method is based on the use of lateral extension elements (134, 135, 136) as a doping mask for the semiconductor layer (113P) of the transistor and etching mask for this same semiconductor layer (113P) this in order to providing contact portions (111A, 112A) of a drain and a source of the transistor (100). The invention further relates to a detection structure (10) capable of being obtained by such a method. Figure for the abstract: Figure 1
机译:本发明涉及一种用于形成包括MOS晶体管(100)作为换能器的电磁辐射检测结构(10)的方法。该方法基于使用横向延伸元件(134、135、136)作为用于晶体管的半导体层(113P)的掺杂掩模以及用于该相同的半导体层(113P)的蚀刻掩模,以便提供接触部分。晶体管(100)的漏极和源极的漏极(111A,112A)。本发明还涉及一种能够通过这种方法获得的检测结构(10)。图为摘要:图1

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