METHOD OF ESTIMATING THE LOCAL TOPOGRAPHY OF A SAMPLE FROM SCANNING ELECTRONIC MICROSCOPY IMAGES AND FROM A MATHEMATICAL MODEL

摘要

METHOD FOR ESTIMATING THE LOCAL TOPOGRAPHY OF A SAMPLE FROM SCANNING ELECTRONIC MICROSCOPY IMAGES AND A MATHEMATICAL MODEL One aspect of the invention relates to a method for estimating the local topography of a sample comprising: a step of acquiring, by a scanning electron microscope, a plurality of images of the sample with different angles of incidence; for each image: a step of calculating a gray level profile; a step of placing a plurality of primary descriptors on the gray level profile; a step of calculating secondary descriptors from the primary descriptors; a step of using the mathematical model to calculate primary topographic quantities from the secondary descriptors; a local topography estimation step consisting in using the mathematical model to calculate secondary topographic quantities from the primary topographical quantities and the previously calculated secondary descriptors. Figure to be published with the abstract: Fig. 2