Method of manufacture for Ion mobility filter

摘要

A support comprises an aperture. An electrode layer is attached to the support to cover the aperture. A plurality of ion mobility electrodes is formed by mechanically dicing through the electrode layer. Each electrode is separate from adjacent electrodes, spans the aperture, and is attached at opposite ends to the support. Each adjacent pair of electrodes defines an ion channel, the channels allowing gas to flow through the aperture. In aspects, potentials applied to the electrodes create first and second electric fields in first and second ion channels. An ionised gas sample flows through the filter, wherein a first portion of ions of a target chemical passes through the first channel, while a second portion is absorbed by the second channel. The channel width may be 10-50 micrometres, the electrode thickness 1-10 micrometres, and the aspect ratio at least 10:1. The electrode layer may be metal.