Systems and methods for in situ high temperature X-ray spectroscopy in electron microscopes

摘要

In some embodiments, a system for collecting information from a sample includes a sample stage and one or more signal detectors. The sample stage includes a heating element, and the heating element is capable of heating at least a portion of the sample stage to at least 100 Celsius. The one or more signal detectors has a detection material with a silicon nitride window positioned between the detection material and the sample stage.