Crystal structure evaluation method and crystal structure evaluation apparatus

摘要

PROBLEM TO BE SOLVED: To evaluate the non-uniformity of a material including crystal grains by using ultrasonic waves even when a site having non-uniformity in the crystal structure exists in only a part of the whole material. A crystal structure evaluation method and a crystal structure evaluation apparatus capable of performing the same are provided. SOLUTION: An ultrasonic wave U is incident on a material S to be inspected made of a material containing crystal grains S3 from a plurality of incident points P on the surface, and the intensity of a scattered wave U3 detected is defined as a scattering intensity. A measurement step of measuring each incident point P, a statistical processing step of organizing the number of the incident points P for which a predetermined scattering intensity is obtained in the measurement step as a function of the scattering intensity, and creating a scattering intensity function; A crystal structure evaluation method having an evaluation step in which the larger the peak width of the scattering intensity function obtained in the processing step is, the higher the nonuniformity of the crystal structure in the inspection target material S is. Further, the crystal structure evaluation apparatus is provided with an ultrasonic inspection apparatus 11 for generating and detecting the ultrasonic waves U and executing such a crystal structure evaluation method. [Selection diagram] Fig. 3