Original oblique illumination method using bright field dark field objective lens and related imaging method

摘要

Problem to be solved: to provide a method for imaging the surface of a sample in an imaging system using a BD objective lens having a dark field channel and a bright visual field.The BD objective lens has a periphery.The sample is irradiated with a first arcuate light passing through the surrounding first arc to an oblique angle through the dark field channel.The first arcuate illumination light reflected on the surface of the sample is recorded as a first image of the sample from a first arcuate illumination light reflected on the surface of the sample, and the processing apparatus processes the first image via the topography imaging method to generate a three-dimensional topography of the sample.The imaging apparatus is also provided as an additional method step for other embodiments.Diagram