Filter control formula derivation method, optical measurement system, Fabry-Perot interference filter control method, and filter control program

摘要

To provide a filter control-type derivation method which can easily acquire a relationship between an application voltage and a permeation wavelength.SOLUTION: A filter control-type derivation method comprises: a preparation step S1 for preparing a Fabry-Perot interference filter in which a distance between a fixed mirror part and a movable mirror part is controlled by the balance of an electrostatic force and an elastic force; first derivation steps S1, S2 for deriving a relationship between a deflection amount and an elasticity index in which the elasticity index of the movable mirror part is described as a second or higher-order polynomial with the deflection amount of the movable mirror part as an index by performing a prescribed measurement; and second derivation steps S4, S7 for deriving a relationship between a permeation wavelength which permeates the Fabry-Perot interference filter and a voltage on the basis of a relationship between the deflection amount and the elasticity index, and a relationship between the electrostatic force and the elastic force. In the first derivation step, the permeation wavelength of light which permeates the Fabry-Perot interference filter is measured in a state that a plurality of different voltages are applied.SELECTED DRAWING: Figure 13