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高精度の曲線伝動測定システム

摘要

The present invention is a high-precision curved transmission measuring system including a transmission unit, a vacuum sealing unit, a motion control unit, and a measuring unit, wherein the transmission unit includes a guide, a slide, It includes a car, a transmission bar, an electric cylinder, and a support mechanism, some cars are placed on the guide, a sensor is attached to the front end of the leading car, and the vacuum sealing unit includes a gate valve, a vacuum chamber, and a vacuum sealing mechanism. , A transmission bar and a guide pass through the vacuum sealing unit and are connected to the car and the electric cylinder, and the motion control unit includes a servo motor, a reduction mechanism, a motor drive, an optical grating and a real-time control device, a limit switch, and a controller. Drive a servomotor by a motor, and a deceleration mechanism interlocks to move an electric cylinder to move, an optical grating participates in a position feedback, a limit switch protects, the measuring unit detects a sensor and corresponding signal collecting and processing equipment. Disclosed is a high-accuracy curve transmission measuring system. The present invention employs curvilinear transmission in a vacuum atmosphere to achieve high precision movement and measurement inside a vacuum or other confined spaces.

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