Inspection performance diagnostic device, inspection performance diagnosis method, program for inspection performance diagnostic device, and inspection performance diagnosis system

摘要

Problem to be solved: to provide an inspection performance diagnostic device capable of diagnosing the performance of the inspection apparatus with high accuracy while inspecting the inspection object.Solution: along with the sheet to be inspected (s) to be conveyedA calibration pattern having a plurality of calibration marks m having a size corresponding to the accuracy required for an inspection apparatus for inspecting the inspection object is photographed (S3).From the image data taken by the inspection object and the calibration patternCalibration marks m in the calibration pattern area 23 Where the calibration pattern has been taken is extracted (S11).The characteristic of each calibration mark m extracted is calculated (S12).Based on the reference features of each calibration markThe performance of the inspection apparatus is determined from the calculated characteristic quantities.Diagram