CAPTEUR DE HAUTEUR DU TYPE À CAPACITÉ ÉLECTROSTATIQUE, BUSE D'USINAGE LASER L'UTILISANT, ET DISPOSITIF D'USINAGE LASER

摘要

Electrostatic capacitance type height sensor (10) includes sensor electrode (11) attached to a tip of laser machining nozzle (1), signal processor (13) that transmits a voltage signal to sensor electrode (11) and detects a signal from sensor electrode (11) to measure a distance between a tip of sensor electrode (11) and workpiece (5) electrically connected to a ground, and cable (12) electrically connecting sensor electrode (11) to signal processor (13). Signal processor (13) includes a disconnection determinator that determines that cable (12) is broken if the signal from sensor electrode (11) is higher or equal to a predetermined level.